Company Filing History:
Years Active: 1997-2006
Title: Seiichi Fukuda: Innovator in Plasma Surface Treatment and Semiconductor Manufacturing
Introduction
Seiichi Fukuda is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the fields of plasma surface treatment and semiconductor manufacturing. With a total of 5 patents to his name, Fukuda's work has had a substantial impact on technology and industry.
Latest Patents
Fukuda's latest patents include a plasma surface treatment system and a plasma surface treatment method. The plasma surface treatment system is designed to irradiate the surface of a substrate with a nitrogen plasma excited by a high-frequency electric field. This innovative approach allows for the introduction of nitrogen into the substrate's surface, achieving a nitriding effect where the peak nitrogen concentration is located at a shallower position. This method enables the attainment of a desired nitrogen concentration through the application of a pulsed high-frequency electric field.
Another notable patent is a dry etching method and a method of manufacturing semiconductor apparatus. This invention provides satisfactory shape controllability and allows for the formation of a gate electrode made of laminated tungsten without damaging the gate insulating film. The process involves sequentially forming a polysilicon film, a tungsten nitride reaction barrier film, a tungsten film, and a silicon nitride offset film on a gate insulating film. The tungsten film is then etched using a photoresist mask and a mixed gas of fluorine, chlorine, oxygen, and nitrogen.
Career Highlights
Seiichi Fukuda is currently employed at Sony Corporation, where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of plasma treatment and semiconductor manufacturing processes.
Collaborations
Fukuda has collaborated with notable colleagues, including Tetsuya Tatsumi and Seiji Samukawa. Their combined expertise has contributed to the success of various projects and innovations within the company.
Conclusion
Seiichi Fukuda is a distinguished inventor whose contributions to plasma surface treatment and semiconductor manufacturing have made a lasting impact on the industry. His innovative patents and collaborative efforts continue to drive advancements in technology.