Sean Simmons

Title: Sean Simmons: Innovator in Lithographic Processing

Introduction

Sean Simmons is an accomplished inventor based in Rolla, MO (US). He has made significant contributions to the field of lithographic processing, holding a total of 3 patents. His work focuses on developing advanced materials that enhance the efficiency and effectiveness of photolithography processes.

Latest Patents

One of Sean's latest patents involves spin-on carbon compositions for lithographic processing. This invention is directed towards spin-on carbon materials that comprise polyamic acid compositions and a crosslinker in a solvent system. These materials are particularly useful in trilayer photolithography processes. The films created with these inventive compositions are not soluble in solvents commonly used in lithographic materials, such as PGME, PGMEA, and cyclohexanone. However, they can be dissolved in developers typically used in photolithography. In one embodiment, the films can be heated at high temperatures to enhance their thermal stability for high-temperature processing. Regardless of the embodiment, the material can be applied to either flat/planar or patterned surfaces. Notably, the material exhibits wiggling resistance during pattern transfer to silicon substrates using fluorocarbon etch.

Career Highlights

Sean Simmons is currently employed at Brewer Science, Inc., where he continues to innovate and develop new materials for lithographic applications. His expertise in this area has positioned him as a key contributor to the company's research and development efforts.

Collaborations

Sean has collaborated with notable coworkers, including Vandana Krishnamurthy and Daniel M Sullivan, who share his commitment to advancing lithographic technologies.

Conclusion

Sean Simmons is a prominent inventor whose work in lithographic processing has led to significant advancements in the field. His innovative patents and collaborations reflect his dedication to improving photolithography processes.