Company Filing History:
Years Active: 2024
Title: Scott E Galica: Innovator in Thermal Electrostatic Clamping Technology
Introduction
Scott E Galica is a notable inventor based in Belmont, MA (US). He has made significant contributions to the field of thermal electrostatic clamping technology. His innovative approach has led to the development of a unique patent that enhances workpiece temperature uniformity.
Latest Patents
Scott E Galica holds a patent for a "Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity." This invention features a thermal electrostatic clamp that includes a central electrostatic portion associated with the central region of a workpiece. The design incorporates a central body with a clamping surface and one or more electrodes that selectively electrostatically clamp the workpiece based on an electrical current. Additionally, the invention includes heaters that selectively heat both the central and peripheral portions of the workpiece to different temperatures, ensuring optimal temperature control during processing.
Career Highlights
Scott is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the field of semiconductor manufacturing equipment. His work focuses on improving the efficiency and effectiveness of thermal management systems in various applications.
Collaborations
Scott has collaborated with his coworker, Atul Gupta, to further enhance the development of advanced technologies in their field.
Conclusion
Scott E Galica's contributions to thermal electrostatic clamping technology exemplify his commitment to innovation and excellence. His patent reflects a significant advancement in ensuring workpiece temperature uniformity, which is crucial for various industrial applications.