Company Filing History:
Years Active: 1998-2002
Title: Scott Beherrell: Innovator in Chemical Vapor Deposition Technology
Introduction
Scott Beherrell is a notable inventor based in Phillipsburg, NJ (US), recognized for his contributions to the field of chemical vapor deposition technology. With a total of 3 patents to his name, Beherrell has made significant advancements that enhance the efficiency and effectiveness of epitaxial deposition processes.
Latest Patents
Among his latest innovations is the "Induction Heated Chemical Vapor Deposition Reactor." This reactor features a pancake-type induction heating device designed to achieve the necessary operating temperature within the reactor chamber. The unique design of the susceptor ensures that the induction magnetic force at the top surface is insufficient to levitate the wafer carrier during high-temperature epitaxial deposition, which typically occurs at temperatures around 1500-1800°C. Another notable patent is the "Wafer Carrier with Flexible Wafer Flat Holder." This apparatus is designed for mounting wafers in an epitaxial reactor, featuring a wafer carrier that holds the wafer during deposition. It includes a depressed region for the wafer and a positioning wire that maintains the wafer's position without interfering with the deposition process.
Career Highlights
Scott Beherrell is currently employed at Emcore Corporation, where he continues to innovate and develop new technologies in the field. His work has been instrumental in advancing the capabilities of chemical vapor deposition systems, making them more efficient and reliable.
Collaborations
Throughout his career, Beherrell has collaborated with talented individuals such as Alexander I Gurary and Vadim Boguslavskiy. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Scott Beherrell's contributions to chemical vapor deposition technology highlight his innovative spirit and dedication to advancing the field. His patents reflect a commitment to improving processes that are crucial in various applications, ensuring his place as a significant figure in the world of invention.