This inventor holds 1 USPTO granted patent. Top assignee: The Machlett Laboratories, Incorporated. Active years: 1983.
Company Filing History:
Years Active: 1983
Title: Saurabh D Emmanuel: Innovator in Soft X-ray Lithography
Introduction
Saurabh D Emmanuel is a notable inventor based in Stamford, CT (US). He has made significant contributions to the field of lithography, particularly through his innovative patent in soft X-ray technology. His work is instrumental in advancing semiconductor manufacturing processes.
Latest Patents
Saurabh D Emmanuel holds a patent for a Soft X-ray lithography system. This system includes an X-ray tube with an evacuated and sealed-off envelope, featuring an X-ray transparent window made of beryllium. The design encloses a rotatable anode target made of graphite, which has an annular sloped surface carrying a focal track layer made of titanium carbide. This configuration generates characteristic titanium K alpha X-rays that pass through the window, aligning with a mask and a workpiece, such as a semiconductor wafer, to facilitate precise irradiation of photoresist film.
Career Highlights
Saurabh D Emmanuel is associated with The Machlett Laboratories, Incorporated, where he applies his expertise in developing advanced lithography systems. His innovative approach has positioned him as a key figure in the field, contributing to the evolution of semiconductor technologies.
Conclusion
Saurabh D Emmanuel's work in soft X-ray lithography exemplifies the intersection of innovation and technology in semiconductor manufacturing. His contributions continue to influence the industry and pave the way for future advancements.