Satoru Noguchi

Title: Satoru Noguchi: Innovator in Semiconductor Processing Technology

Introduction

Satoru Noguchi is a prominent inventor based in Tama, Japan. He has made significant contributions to the field of semiconductor processing technology. With a total of 2 patents, his work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Satoru Noguchi's latest patents is titled "Ignition control of remote plasma unit." This patent describes a method for maintaining a remote plasma unit used for cleaning semiconductor-processing apparatuses. The method includes detecting if the apparatus is in an idle state, igniting the remote plasma unit after a specified time period if idle, and retrying ignition if the unit does not ignite successfully. Another notable patent is the "Method of recipe control operation." This invention outlines a process for controlling multiple processing targets in a semiconductor apparatus using recipes that specify control parameters. The method involves specifying correction coefficients for each processing target to adjust the parameters' values effectively.

Career Highlights

Satoru Noguchi is currently employed at ASML Japan K.K., where he continues to innovate in the semiconductor industry. His work has been instrumental in advancing technologies that enhance the performance and reliability of semiconductor manufacturing.

Collaborations

Throughout his career, Satoru has collaborated with notable colleagues, including Masahiro Takizawa and Takashi Wada. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Satoru Noguchi's contributions to semiconductor processing technology through his patents and collaborations highlight his role as an influential inventor. His innovative methods continue to shape the future of semiconductor manufacturing.