Location History:
- Inagi, JP (2008)
- Tokyo, JP (2012)
Company Filing History:
Years Active: 2008-2012
Title: The Innovative Contributions of Satoko Seta
Introduction
Satoko Seta is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of semiconductor manufacturing. With a total of 2 patents, her work has advanced the technology used in this critical industry.
Latest Patents
Satoko Seta's latest patents include a method of manufacturing a semiconductor device that focuses on planarizing a silicon oxide film. This method utilizes chemical mechanical polishing with a silicon film as a stopper film. A surface modification film is formed to hydrophilize the surface of the silicon film, while the polishing slurry contains cerium oxide particles, a surface active agent, and resin particles with functional groups. Another patent she holds describes a method of manufacturing a semiconductor device that involves forming an insulating film above a substrate and creating a recess in the insulating film. This process includes forming an underlying layer, an immediate layer, and a resist film, with specific steps for polishing and patterning.
Career Highlights
Satoko Seta works at Kabushiki Kaisha Toshiba, a leading company in the technology sector. Her innovative approaches have contributed to the advancement of semiconductor technology, making her a valuable asset to her organization.
Collaborations
Some of her notable coworkers include Yukiteru Matsui and Atsushi Shigeta. Their collaborative efforts have further enhanced the research and development in semiconductor manufacturing.
Conclusion
Satoko Seta's contributions to semiconductor technology through her patents and work at Toshiba highlight her role as an influential inventor in the industry. Her innovative methods continue to shape the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.