Sanjit K Das

Title: The Innovative Contributions of Sanjit K Das

Introduction

Sanjit K Das is a prominent inventor based in Austin, Texas, known for his significant contributions to the field of semiconductor technology. With a total of five patents to his name, he has made remarkable advancements that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

One of his latest patents is a method of chemical mechanical planarization using a water rinse. This innovative method provides a semiconductor device with a device front surface and a device back surface, where the front surface is the top surface of a second metal layer. The process involves a first planarizing step that uses a first medium to expose a device second front surface, followed by a rinsing step that rinses the device back surface with water. A second planarizing step then utilizes a second medium to planarize the device second front surface.

Another notable patent is related to chemical mechanical polishing (CMP) slurry for polishing copper. This method begins with the formation of a dielectric layer that has an opening, followed by the creation of a tantalum-based barrier layer within the opening. A copper layer is then formed over the barrier layer. The process includes a first CMP process to polish the copper and a second CMP process that polishes exposed portions of the barrier layer faster than the dielectric layer or the copper layer. This two-step CMP process results in a copper interconnect with a tantalum-based barrier across the integrated circuit substrate.

Career Highlights

Sanjit K Das is currently employed at Motorola Corporation, where he continues to innovate and contribute to the advancement of semiconductor technologies. His work has been instrumental in improving the manufacturing processes of integrated circuits.

Collaborations

Throughout his career, Sanjit has collaborated with notable colleagues, including Rajeev Bajaj and Janos Farkas. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Sanjit K Das is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His innovative patents and collaborations with esteemed colleagues highlight his commitment to enhancing the efficiency of semiconductor devices.