Sanjeev R Chitre

Title: Sanjeev R Chitre: Innovator in Semiconductor Technology

Introduction

Sanjeev R Chitre is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor technology. With a total of 2 patents, his work focuses on innovative methods and systems that enhance semiconductor processing.

Latest Patents

One of his latest patents is the "Integrated dry-wet semiconductor layer removal apparatus and method." This invention describes a system and process for removing a layer of a defined composition from a semiconductor wafer. The process involves performing at least one dry layer removal operation followed by at least one wet removal operation. The design includes a dry removal unit and a wet removal unit positioned adjacent to each other, with robot mechanisms that automatically transfer one wafer at a time through each unit. This ensures uniform treatment of both major surfaces of the wafer. The dry stripping operation is performed first to remove a portion of the resist layer, followed by the wet stripping operation to complete the removal. After the wet treatment, the wafer is rinsed, and the used rinse water is monitored for resistivity and total organic content to confirm the removal of undesired materials. Additionally, he has developed a "Conveyorized microwave heating system," which allows for the serial heating of objects within multiple separate heating zones. This system utilizes pallets made of microwave absorptive material that are sequentially moved through microwave cavities, heating the objects by conduction.

Career Highlights

Sanjeev has worked with several companies, including Superwave Technology, Inc. and Integrated Process Equipment Corporation. His experience in these organizations has contributed to his expertise in semiconductor technologies and processes.

Collaborations

Throughout his career, Sanjeev has collaborated with notable professionals in the field, including Behrooz Minaee and Takio Tamaki. These collaborations have further enriched his work and innovations.

Conclusion

Sanjeev R Chitre is a distinguished inventor whose contributions to semiconductor technology have paved the way for advancements in the industry. His innovative patents and career achievements reflect his commitment to enhancing semiconductor processing methods.