Sangyeon Oh

Title: Sangyeon Oh - Innovator in Electrostatic Chuck Apparatus and Substrate Supporter Technologies

Introduction

Sangyeon Oh is an inventor based in Suwon-si, South Korea. He is known for his innovative contributions to the field of electrostatic chuck apparatus and substrate processing technologies. Although he currently holds no granted patents, his work in developing advanced technologies showcases his commitment to innovation.

Latest Patent Applications

Sangyeon Oh has submitted several notable patent applications, including:

1. **ELECTROSTATIC CHUCK APPARATUS** - This application describes an electrostatic chuck apparatus that includes a chuck plate designed to support a wafer. The apparatus features a shaft extending from the bottom surface of the chuck plate, an inner electrode with a disc shape, and multiple outer electrodes arranged radially around the inner electrode. The design aims to enhance the efficiency and effectiveness of wafer support during processing.

2. **SUBSTRATE SUPPORTER** - This application relates to substrate supporters and processing apparatuses. The substrate supporter includes an upper surface for loading a substrate, a base, and an outer dam along the edge of the base. It also features a contact band that extends around the base's circumference, onto which the substrate is loaded. The design includes a first contact pattern that extends into the contact band, providing improved support and processing capabilities.

Conclusion

Sangyeon Oh's innovative work in electrostatic chuck apparatus and substrate supporter technologies highlights his potential as an inventor in the field. His latest patent applications reflect a dedication to advancing substrate processing technologies.