Sang-Young Moon

Title: Sang-Young Moon and Semiconductor Contamination Analysis

Introduction

Sang-Young Moon is an inventor associated with Kyungki-do, South Korea, and Samsung Electronics Co., Ltd. His work includes a patented approach for depositing molecular impurities on semiconductor wafers to help identify sources of contamination. The available information lists 1 patent for Moon.

Latest Patents

Moon’s patent, “Apparatus and Method for Depositing Molecular Impurities on a Semiconductor Wafer,” describes a system for quantitatively depositing molecular impurities onto a wafer. It includes a reaction chamber, a source-gas generator, a humidifier that produces moisture vapor at a constant temperature, and a mixer that combines the source gas and vapor. A gas injector delivers the mixture into the chamber.

The apparatus also includes an exhaust system that establishes a vacuum before deposition and removes remaining gases afterward. A cleaning-air supply cleans the reaction chamber before the deposition process. The processed wafer can then be used to fabricate a semiconductor device, which can be analyzed to trace the source of contamination.

Career Highlights

Moon’s listed patent focuses on a controlled method for introducing molecular impurities during semiconductor processing. By enabling contamination sources to be investigated through analysis of a fabricated device, the invention supports efforts to diagnose defects in semiconductor manufacturing.

Collaborations

The provided information names Jung-sung Hwang and Dong-Joo Lee as Moon’s coworkers. It does not specify their roles in the patent or describe the nature of their collaboration.

Conclusion

Sang-Young Moon’s listed invention provides a structured way to deposit molecular impurities on semiconductor wafers and investigate contamination in resulting devices.