Seoul, South Korea

Sang-Woo Bae

USPTO Granted Patents = 4 

Average Co-Inventor Count = 5.3

ph-index = 1


Company Filing History:


Years Active: 2013-2021

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4 patents (USPTO):Explore Patents

Title: The Innovations of Sang-Woo Bae

Introduction

Sang-Woo Bae is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of plasma technology, holding a total of four patents. His work focuses on advanced plasma sensing and monitoring systems, which are crucial for various applications in semiconductor manufacturing.

Latest Patents

Sang-Woo Bae's latest patents include a plasma sensing device and a plasma monitoring system designed to control plasma processes. The plasma monitoring system features a plasma chamber that performs plasma processes, equipped with first and second plasma sensing devices. These devices generate detection signals based on incident beams radiated from the monitoring plasma plane. The controller utilizes these signals to detect two-dimensional plasma distribution information and manage the plasma processes effectively. Another notable patent involves a method for detecting defects on a substrate, which utilizes second harmonic generation (SHG) beams to identify nano-sized defects, enhancing the quality control in semiconductor device manufacturing.

Career Highlights

Throughout his career, Sang-Woo Bae has worked with leading companies in the technology sector, including Samsung Electronics Co., Ltd. and Samsung Display Co., Ltd. His experience in these organizations has allowed him to develop innovative solutions that address complex challenges in plasma technology and semiconductor manufacturing.

Collaborations

Sang-Woo Bae has collaborated with notable colleagues, including Won-Don Joo and Sang-Hyun Yun. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.

Conclusion

Sang-Woo Bae's contributions to plasma technology and semiconductor manufacturing are noteworthy. His innovative patents and collaborations reflect his commitment to advancing the field and improving manufacturing processes. His work continues to influence the industry and pave the way for future innovations.

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