This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2014.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2014
Title: The Innovative Contributions of Sang Phil Lee
Introduction
Sang Phil Lee is a notable inventor based in Kyounggi-Do, CN. He has made significant contributions to the field of semiconductor technology, particularly in the area of chamber cleaning processes.
Latest Patents
One of his key patents is titled "In-situ chamber cleaning for an RTP chamber." This invention presents a method for cleaning a chamber used for annealing doped wafer substrates. The method involves removing dopants deposited in an annealing chamber after the annealing process by flowing one or more volatilizing gases into the chamber. Heat is then applied to volatilize the deposited dopants, followed by exhausting the chamber to remove the volatilized dopants.
Career Highlights
Sang Phil Lee is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable colleagues, including Balasubramanian Ramachandran and Tae Jung Kim, to further advance innovations in their field.
Conclusion
Sang Phil Lee's contributions to semiconductor technology, particularly through his innovative patent, demonstrate his commitment to improving manufacturing processes. His work continues to influence the industry positively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile