Sang Jun Cho

Title: The Innovations of Sang Jun Cho

Introduction

Sang Jun Cho is a notable inventor based in San Ramon, CA. He has made significant contributions to the field of semiconductor technology, particularly in the area of low-k dielectric materials. With a total of 2 patents, his work has had a substantial impact on the industry.

Latest Patents

Cho's latest patents include innovative methods aimed at enhancing the performance and reliability of semiconductor devices. One of his patents focuses on "Reducing damage to low-K materials during photoresist stripping." This method involves forming features in a porous low-k dielectric layer beneath a patterned organic mask. The process includes etching features into the dielectric layer and stripping the organic mask using a stripping gas that comprises COS, which is then converted into plasma. A cap layer may be applied to protect the porous low-k dielectric layer during this process.

Another significant patent is titled "Trilayer resist organic layer etch." This invention provides a method for forming dual damascene features in a porous low-k dielectric layer. The process includes forming vias in the dielectric layer, creating an organic planarization layer that fills these vias, and then applying a photoresist mask. Features are etched into the organic layer using a CO-containing etch gas, which is also converted into plasma. This method allows for precise etching of trenches into the porous low-k dielectric layer.

Career Highlights

Sang Jun Cho is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in advancing technologies that improve the manufacturing processes of semiconductor devices.

Collaborations

Throughout his career, Cho has collaborated with talented individuals such as Sean S Kang and Thomas S Choi. These collaborations have fostered an environment of innovation and have contributed to the successful development of his patents.

Conclusion

Sang Jun Cho's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the field. His innovative methods for handling low-k materials are paving the way for advancements in semiconductor manufacturing.