This inventor holds 3 USPTO granted patents. Top assignees: University of California, Euv LLC.. Active years: 2002-2005.
Company Filing History:
Years Active: 2002-2005
Title: Innovations of Samuel L Thompson
Introduction
Samuel L Thompson is an accomplished inventor based in Pleasanton, CA (US). He holds a total of 3 patents that showcase his expertise in ultra-precision positioning and innovative chucking surfaces. His work has significantly contributed to advancements in precision engineering and manufacturing processes.
Latest Patents
One of his latest patents is a "Method and system for ultra-precision positioning." This invention discloses an apparatus and method for achieving ultra-precision positioning through a slide base and slide plate mechanism. The slide plate moves along a first geometric axis, utilizing either a ball-screw or a piezoelectric actuator to achieve precise displacement. The design includes a linking device that directs a primary force vector into the center-line of the ball-screw, ensuring accurate positioning. Additionally, multiple slide assemblies can be configured to allow for versatile platform movements.
Another notable patent is the "Compliant layer chucking surface." This invention describes a method and apparatus where a thin layer of compliant material is deposited on a chuck's surface. This design mitigates deformation caused by entrapped particles during clamping, enhancing the integrity of parts such as masks or wafers. The compliant layer can be made from various materials, including metals or polymers, and can be patterned to reduce particle entrapment.
Career Highlights
Samuel has worked with prestigious institutions, including the University of California and Euv LLC. His experience in these organizations has allowed him to refine his skills and contribute to significant technological advancements.
Collaborations
Samuel has collaborated with notable individuals in his field, including Richard C Montesanti and Stanley F Locke. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Samuel L Thompson's contributions to the field of precision engineering through his patents reflect his innovative spirit and dedication to advancing technology. His work continues to influence the industry and inspire future inventors.