Sam Hyungsam Kim

Title: Sam Hyungsam Kim: Innovator in Plasma Technology

Introduction

Sam Hyungsam Kim is a notable inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in plasma generation methods. With a total of 2 patents, his work has implications for improving manufacturing processes in the electronics industry.

Latest Patents

Sam's latest patents include a "Method of generating plasma in remote plasma source" and a "Method of fabricating semiconductor device using the same method." These innovations provide a method of generating plasma that enhances selectivity in the etching process while minimizing damage to layers. The method involves generating first plasma by supplying at least one first process gas into a first remote plasma source (RPS) and applying first energy at a specific power and duty ratio. Additionally, it includes generating second plasma by supplying at least one second process gas into a second RPS and applying second energy at a different power and duty ratio.

Career Highlights

Sam Hyungsam Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to develop cutting-edge technologies. His work focuses on enhancing semiconductor fabrication processes, which are crucial for the advancement of electronic devices.

Collaborations

Some of his notable coworkers include Sangheon Lee and Gon-jun Kim, who collaborate with him on various projects within the company.

Conclusion

Sam Hyungsam Kim's contributions to plasma technology and semiconductor fabrication are noteworthy. His innovative methods are paving the way for advancements in the electronics industry.