Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,324 patents)
2 patents:
1. 9966274 - Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method
2. 9685346 - Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method