Location History:
- Fremont, CA (US) (2008)
- Newark, CA (US) (2023)
Company Filing History:
Years Active: 2008-2023
Title: Sam Do Lee: Innovator in Plasma Processing Technology
Introduction
Sam Do Lee is a prominent inventor based in Fremont, CA, known for his contributions to plasma processing technology. With a total of 2 patents, he has made significant advancements in the field, particularly in etching processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
Sam Do Lee's latest patents include innovative methods that address critical challenges in the semiconductor industry. One of his notable inventions is the "Silicon oxide silicon nitride stack stair step etch." This method provides a way to form a stair-step structure in a stack on a substrate through a series of cycles that involve trimming the mask and etching the stack. The process utilizes specific etching gases to achieve precise results.
Another significant patent is the "Tungsten silicide etch process with reduced etch rate micro-loading." This invention improves the tungsten silicide etching process by minimizing the micro-loading effect, which can adversely affect etching uniformity. The method involves a carefully balanced etching gas mixture and generates plasma to etch the metal silicide layer effectively.
Career Highlights
Sam Do Lee is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on developing advanced etching processes that are crucial for the production of integrated circuits. His expertise in plasma processing has positioned him as a valuable asset in the field.
Collaborations
Throughout his career, Sam has collaborated with talented individuals such as Sok Kiow Tan and Shenjian Liu. These collaborations have fostered innovation and contributed to the development of cutting-edge technologies in semiconductor manufacturing.
Conclusion
Sam Do Lee's contributions to plasma processing technology and his innovative patents have significantly impacted the semiconductor industry. His work continues to drive advancements that enhance manufacturing processes and improve product quality.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.