Sagy Levy

Title: Innovations by Sagy Levy in Semiconductor Technology

Introduction

Sagy Levy is an accomplished inventor based in Sunnyvale, CA, known for his contributions to semiconductor technology. With a total of 2 patents, Levy has made significant advancements in the field, particularly in semiconductor wafer pretreatment.

Latest Patents

Levy's latest patents include innovative methods for semiconductor wafer pretreatment. One of his notable inventions is a method utilizing ultraviolet activated chlorine. This method involves treating a semiconductor wafer with a mixture of HF and CH₃OH, followed by exposure to chlorine while simultaneously applying ultraviolet energy. This process enhances the selective hemispherical grain (HSG) temperature of formation window, improving robustness against changes in reactor conditions and selectivity concerning underlying dielectric layers.

Another significant patent focuses on selective hemispherical grain silicon deposition. This method increases the selectivity of silicon deposition concerning an underlying oxide layer. By broadening the selective temperature of formation window, the process involves pumping water from the processing chamber and depositing silicon-containing material on the semiconductor wafer. Additionally, seeding the wafer with a germanium-containing gas and introducing chlorine-containing precursors can further enhance selectivity.

Career Highlights

Throughout his career, Sagy Levy has worked with notable companies such as Ag Associates (Israel) Ltd. and Mattson Technology, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Levy has collaborated with several professionals in the field, including Yitzhak Eric Gilboa and Benjamin Brosilow. These collaborations have likely enriched his work and led to further advancements in semiconductor technology.

Conclusion

Sagy Levy's contributions to semiconductor technology through his patents and career experiences highlight his role as an influential inventor in the industry. His innovative methods for wafer pretreatment continue to impact the field significantly.