Sagamihara, Japan

Ryuichi Hoshika


 

Average Co-Inventor Count = 3.2

ph-index = 2

Forward Citations = 10(Granted Patents)


Company Filing History:


Years Active: 2010-2018

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9 patents (USPTO):Explore Patents

Title: Ryuichi Hoshika: Innovator in Exposure Technology

Introduction

Ryuichi Hoshika, an accomplished inventor based in Sagamihara, Japan, has made significant contributions to the field of optical exposure technology. With a total of 9 patents to his name, Hoshika's innovative spirit is reflected in his latest work on exposure apparatuses and methods that enhance the accuracy and efficiency of device manufacturing.

Latest Patents

Hoshika's recent patents include advancements in exposure apparatuses and methods for producing devices. One notable invention is the exposure apparatus (EX), designed to expose a substrate by irradiating exposure light using a projection optical system and a specialized liquid. This apparatus features a substrate table (PT) designed to hold the substrate and includes a plate member with a liquid-repellent flat surface that prevents liquid accumulation, ensuring excellent exposure accuracy.

Additionally, he has developed an exposure method that utilizes a liquid immersion device equipped with a mixing mechanism. This mechanism adjusts the specific resistance of a supplied liquid, which is dispensed onto a liquid-repellent film on the surface of an object in a projection optical system. This innovative approach forms a liquid immersion area necessary for precise optical operations.

Career Highlights

Hoshika's professional journey is closely tied to Nikon Corporation, where he has worked on several cutting-edge technologies that enhance imaging and exposure processes. His expertise in optical systems and device manufacturing has led to numerous inventions that push the boundaries of current technology.

Collaborations

Throughout his career, Ryuichi Hoshika has collaborated with other talented professionals, including Hiroyuki Nagasaka and Hiroaki Takaiwa. These collaborations have fostered an environment of innovation, helping to advance the state of technology in their field.

Conclusion

Ryuichi Hoshika stands out as a prominent inventor whose work continues to shape the future of exposure technology. With his innovative patents and contributions at Nikon Corporation, Hoshika plays a crucial role in the evolution of optical systems, marking him as a key figure in the ongoing quest for technological advancement.

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