This inventor holds 1 USPTO granted patent. Top assignee: Tokyo Electron Limited. Active years: 2025.
Company Filing History:
Years Active: 2025
Title: Ryota Kozuka: Innovator in Wafer Processing Technology
Introduction
Ryota Kozuka is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in wafer processing methods. His innovative approach has led to advancements that enhance the efficiency and effectiveness of wafer fabrication.
Latest Patents
Kozuka holds a patent for a wafer processing method. This method involves preparing a wafer with a substrate and a silicon-containing film, forming a hard mask on the film, and etching the hard mask to create a pattern. The process further includes etching the silicon-containing film using the hard mask, which consists of a first film containing tungsten and a second film containing zirconium or titanium and oxygen. This patent showcases his expertise in semiconductor manufacturing techniques and his commitment to innovation.
Career Highlights
Ryota Kozuka is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has allowed him to apply his inventive skills in a practical setting, contributing to the development of cutting-edge technologies. His dedication to research and development has positioned him as a key player in the field.
Collaborations
Kozuka has collaborated with notable colleagues, including Yasuhiro Hamada and Noriaki Okabe. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas, further enhancing the impact of their work in the semiconductor industry.
Conclusion
Ryota Kozuka's contributions to wafer processing technology exemplify the spirit of innovation in the semiconductor field. His patent and work at Tokyo Electron Limited highlight his role as a significant inventor. His ongoing efforts continue to shape the future of semiconductor manufacturing.
