Company Filing History:
Years Active: 2010
Title: Ryota Fukui: Innovator in Ion Implanting Technology
Introduction
Ryota Fukui is a notable inventor based in Susono, Japan. He has made significant contributions to the field of ion implantation technology, particularly in the manufacturing of single crystal films. His innovative approach has led to advancements that are crucial for various applications in semiconductor manufacturing.
Latest Patents
Fukui holds a patent for an ion implanting apparatus. This apparatus is designed to manufacture a single crystal film by extracting a hydrogen ion or a rare-gas ion from an ion source. The process involves selecting a desired ion with a first sector electromagnet, scanning the ion with a scanner, and collimating the ion with a second sector electromagnet before implanting it into a substrate. The configuration of the ion source is strategically placed close to the entrance side focal point of the first sector electromagnet. When the aperture of the extraction section of the ion source is circular and the entrance side focal points in the deflection surface and a surface perpendicular to it in the first sector electromagnet are coincident, the ion beam becomes completely parallel in two surfaces, resulting in a circular spot shape. This innovation is encapsulated in his 1 patent.
Career Highlights
Fukui is currently employed at Ulvac, Inc., a company known for its advanced technologies in vacuum equipment and materials. His work at Ulvac has allowed him to further develop his ideas and contribute to the company's mission of providing cutting-edge solutions in the semiconductor industry.
Collaborations
Fukui has collaborated with notable colleagues such as Seiji Ogata and Hidekazu Yokoo. Their combined expertise has fostered an environment of innovation and creativity, leading to advancements in their respective fields.
Conclusion
Ryota Fukui's contributions to ion implantation technology exemplify the spirit of innovation in the semiconductor industry. His patent and work at Ulvac, Inc. highlight his role as a key player in advancing manufacturing techniques for single crystal films.