Company Filing History:
Years Active: 2004-2005
Title: Innovations of Ryan Tadashi Fujimoto
Introduction
Ryan Tadashi Fujimoto is a notable inventor based in Gresham, OR (US). He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on optimizing plasma processes to enhance performance and reduce damage in semiconductor manufacturing.
Latest Patents
Fujimoto's latest patents include a method for reducing process plasma damage using optical spectroscopy. This innovative approach involves measuring optical emission spectra from a test wafer during a plasma process using a spectrometer. By correlating the emission spectra with the plasma charging voltage, he identifies the species contributing to plasma charging voltage. This real-time monitoring allows for the optimization of plasma processes to prevent damage.
Another significant patent is related to plasma passivation. This method involves forming a conductive trace on a substrate, which is patterned with a photoresist mask and etched. The process includes generating a remote plasma from ammonia and oxygen gases, which helps withdraw chlorine gas from the polymer layer. This innovative technique enhances the efficiency of the etching process and improves the quality of the conductive traces.
Career Highlights
Fujimoto is currently employed at LSI Logic Corporation, where he continues to develop cutting-edge technologies in semiconductor manufacturing. His expertise in plasma processing has positioned him as a valuable asset to his team and the industry.
Collaborations
Throughout his career, Fujimoto has collaborated with talented individuals such as Shiqun Gu and Peter McGrath. These collaborations have fostered innovation and contributed to the advancement of their projects.
Conclusion
Ryan Tadashi Fujimoto's contributions to plasma processing technology demonstrate his commitment to innovation in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in plasma processes, making him a key figure in this field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.