Russell M Singleton

Title: Russell M Singleton: Innovator in Wafer Inspection Technology

Introduction

Russell M Singleton is a notable inventor based in Sunnyvale, CA. He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer inspection systems. With a total of 2 patents, Singleton's work has advanced the capabilities of automated inspection processes.

Latest Patents

Singleton's latest patents include an "Electronic control of an automatic wafer inspection system" and a "Method and apparatus for automatic wafer inspection." The first patent describes a sophisticated system designed for both micro and macro inspection of patterned wafers. This system features an X-Y stage for positioning wafers, multiple cassettes for storage, and an optical system for macro inspection. It also includes an autofocus apparatus that ensures precise imaging during micro inspections. The second patent outlines an automatic semiconductor wafer inspection system that utilizes a high-speed image computer to analyze defects under varying lighting conditions and magnifications.

Career Highlights

Singleton is currently employed at Kla Instruments Corporation, where he continues to innovate in the field of semiconductor inspection technology. His work has been instrumental in enhancing the efficiency and accuracy of wafer inspections, which are critical in semiconductor manufacturing.

Collaborations

Throughout his career, Singleton has collaborated with notable colleagues such as Paul Sandland and Kenneth Levy. These partnerships have contributed to the development of advanced technologies in the semiconductor industry.

Conclusion

Russell M Singleton's contributions to wafer inspection technology have established him as a key figure in the field. His innovative patents and ongoing work at Kla Instruments Corporation continue to shape the future of semiconductor manufacturing.