Company Filing History:
Years Active: 1991-1993
Title: Innovations by Inventor Russell Bowman in Semiconductor Processing
Introduction
Russell Bowman is a prolific inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor processing. With three patents to his name, Bowman's work primarily focuses on improving manufacturing processes and measurement techniques in the industry.
Latest Patents
One of Bowman's notable innovations is the patent for "In-situ measurement of a thin film deposited on a wafer," which describes a method and apparatus for accurately assessing the thickness of layers deposited on silicon wafers. This invention involves detecting radiation emission from the top of the silicon wafer while compensating for temperature variations to ensure precise measurement of polycrystalline layers.
Another significant patent is for the "Double-dome reactor for semiconductor processing," which presents a sophisticated thermal reactor designed for epitaxial deposition. This reactor features a double-dome vessel with dual heat sources, ensuring uniform heating through both circumferential and radial methods. Such precision control enhances throughput, reduces manufacturing costs, and provides flexibility in gas introduction during processing.
Career Highlights
Throughout his career at Applied Materials, Inc., Bowman's advancements have helped streamline the semiconductor manufacturing process. His expertise in thermal reactors and measurement techniques reflects the innovative spirit that drives the semiconductor industry forward.
Collaborations
In his journey, Bowman has collaborated with esteemed coworkers like Roger N. Anderson and John G. Martin, contributing to a dynamic team focused on pushing the boundaries of technology in semiconductor fabrication. The synergy within his team has sparked revolutionary ideas, leading to the fruition of several successful patents.
Conclusion
Russell Bowman stands out as an influential figure in the realm of semiconductor innovations. His patents not only reflect his technical acumen but also illustrate his commitment to enhancing manufacturing processes. As technology continues to evolve, Bowman's contributions will undoubtedly leave a lasting impact on the industry.