Rod Lenz

Title: The Innovative Contributions of Rod Lenz

Introduction

Rod Lenz is a notable inventor based in Tempe, AZ (US). He has made significant contributions to the field of wafer handling technology. His innovative approach has led to the development of a unique method that minimizes contact with wafers during handling processes.

Latest Patents

Lenz holds a patent for a "Method for handling of wafers with minimal contact." This invention features a carrier comprising three support elements connected by an underlying frame. The periphery of a wafer rests upon these support elements. The invention also includes a wafer handler equipped with multiple arms. Spacers are designed to elevate the carrier above a base plate associated with a station in a wafer handling area. The handler operates without making contact with the wafer, ensuring its integrity. A method of using the handler and carrier allows for lifting and rotating the carrier with the wafer through various stations. A control device is integrated to reduce the handler's speed at critical points in the processing cycle. Notably, the handler can move multiple carriers and wafers simultaneously.

Career Highlights

Rod Lenz is currently employed at Asm America, Inc. His work at this company has been instrumental in advancing wafer handling technologies. Lenz's innovative solutions have contributed to improved efficiency and safety in wafer processing.

Collaborations

Throughout his career, Lenz has collaborated with notable colleagues, including Paul R Carr and Paul T Jacobson. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Rod Lenz's contributions to wafer handling technology exemplify the impact of innovation in the field. His patented methods and collaborative efforts continue to influence advancements in the industry.