The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Feb. 24, 1999
Paul R. Carr, Gilbert, AZ (US);
Paul T. Jacobson, Phoenix, AZ (US);
James F. Kusbel, Fountain Hills, AZ (US);
James S. Roundy, Gilbert, AZ (US);
Ravinder K. Aggarwal, Gilbert, AZ (US);
Ivo Raaijmakers, Phoenix, AZ (US);
Rod Lenz, Tempe, AZ (US);
Nilesh Rajbharti, Peoria, AZ (US);
ASM America, Inc., Phoenix, AR (US);
Abstract
The invention is a carrier comprising three support elements connected by an underlying frame. The periphery of a wafer rests upon the support elements. The invention also comprises a wafer handler with a plurality of arms. Spacers space the carrier above a base plate associated with a station in a wafer handling area. An arm slides beneath the frame and between the spacers, but the handler does not contact the wafer. A method of using the handler and carrier is provided where the handler lifts and rotates the carrier with the wafer through various stations in a wafer handling area. A control device reduces the handler speed only at critical points of the processing cycle. The handler is capable of moving a plurality of carriers and wafers simultaneously.