Company Filing History:
Years Active: 2003-2015
Title: Innovations of Robert W Zigner, Jr.
Introduction
Robert W Zigner, Jr. is an accomplished inventor based in Hyde Park, NY (US). He has made significant contributions to the field of semiconductor cleaning systems, holding a total of 3 patents. His work focuses on enhancing the efficiency and sustainability of cleaning processes in the semiconductor industry.
Latest Patents
Zigner's latest patents include innovative methods and systems for cleaning semiconductor wafers using recyclable persulfuric acid. One of his notable inventions is a cleaning vessel designed to clean semiconductor wafers immersed in a bath of persulfuric acid cleaning solution. This system circulates the cleaning solution through a primary process tool fluid path and includes a secondary fluid path that diverts a portion of the solution for electrolysis treatment. The electrolysis reactor within this path oxidizes sulfate ions to form persulfate ions, which are then recombined with the fluid from the primary path and fed back to the cleaning vessel. Another patent outlines a method for implementing cleaning solution replacement in this recyclable fluid cleaning system, which involves monitoring electrode voltage and operating time until a predetermined trigger point is reached.
Career Highlights
Zigner is currently employed at International Business Machines Corporation (IBM), where he continues to develop innovative solutions for the semiconductor industry. His work has contributed to advancements in cleaning technologies that are both effective and environmentally friendly.
Collaborations
Throughout his career, Zigner has collaborated with notable colleagues, including Charles Jesse Taft and Richard O Henry. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Robert W Zigner, Jr. is a prominent inventor whose work in semiconductor cleaning systems has led to significant advancements in the industry. His innovative patents reflect a commitment to improving efficiency and sustainability in semiconductor manufacturing processes.