Hopewell Junction, NY, United States of America

Robert Van Den Berg


Average Co-Inventor Count = 4.0

ph-index = 5

Forward Citations = 67(Granted Patents)


Company Filing History:


Years Active: 2001-2004

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5 patents (USPTO):

Title: The Innovations of Robert van den Berg

Introduction

Robert van den Berg is an accomplished inventor based in Hopewell Junction, NY, whose work has significantly impacted the semiconductor industry. With a total of five patents to his name, he has developed methods and apparatuses that enhance the functionality and efficiency of semiconductor manufacturing processes.

Latest Patents

One of van den Berg's notable patents focuses on achieving improved Chemical Mechanical Polishing (CMP) uniformity. This innovation entails providing enhanced control of slurry distribution, where a slurry dispenser functions from multiple dispensing points to ensure even distribution. Additionally, the implementation of a squeeze bar between the slurry dispenser and wafer helps in further redistributing the slurry, ensuring optimal polishing results.

Another of his groundbreaking patents is a method and apparatus for overlay measurement on semiconductor wafers. This process involves forming repetitive alignment marks with consistent periods on different layers of the wafer. Through Fourier transformations, images of these alignment marks are converted from the space domain to the frequency domain, allowing the calculation of phase differences for precise alignment measurements between the patterns on various layers.

Career Highlights

Throughout his career, van den Berg has worked at prominent companies, including Infineon Technologies AG. His contributions to these companies underscore his expertise in semiconductor technology and innovation.

Collaborations

Van den Berg has collaborated with notable professionals in the field, including Stefan J. Weber and Axel Christoph Brintzinger. These collaborations reflect his commitment to pushing the boundaries of semiconductor advancements through teamwork and shared knowledge.

Conclusion

With his extensive portfolio of patents and significant contributions to the semiconductor industry, Robert van den Berg exemplifies innovation at its finest. His work continues to pave the way for improvements in semiconductor manufacturing processes, demonstrating the importance of inventors in driving technological progress.

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