Saratoga, CA, United States of America

Robert S Kearns


Average Co-Inventor Count = 2.3

ph-index = 2

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 2002-2005

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3 patents (USPTO):Explore Patents

Title: The Innovations of Robert S. Kearns

Introduction

Robert S. Kearns is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of semiconductor fabrication and processing tools. With a total of 3 patents, Kearns has developed innovative solutions that enhance the efficiency and functionality of various technologies.

Latest Patents

Kearns' latest patents include a "Stage with Two Substrate Buffer Station" and an "Edge Gripped Substrate Loading and Unloading Method." The first patent describes a stage used in semiconductor fabrication that features a two substrate buffer station and a movable chuck. This design allows for the efficient loading and unloading of substrates, improving the overall processing workflow. The second patent introduces a substrate lift mechanism that utilizes a plurality of fingers mounted on a hoop to transfer substrates from an edge grip arm to a chuck on processing tools. This mechanism is designed to minimize space requirements while enhancing the adaptability of existing processing tools.

Career Highlights

Robert S. Kearns is currently employed at Nanometrics Inc., where he continues to innovate and contribute to advancements in semiconductor technology. His work has been instrumental in developing tools that streamline the manufacturing process and improve product quality.

Collaborations

Throughout his career, Kearns has collaborated with talented individuals such as Joseph T. Adams and Blaine R. Spady. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Robert S. Kearns is a distinguished inventor whose work has significantly impacted the semiconductor industry. His innovative patents and collaborations demonstrate his commitment to advancing technology and improving manufacturing processes.

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