Company Filing History:
Years Active: 1978-1994
Title: Innovations of Robert R. Wilbarg
Introduction
Robert R. Wilbarg is a notable inventor based in Hopewell Junction, NY (US). He has made significant contributions to the field of microelectronics, holding a total of five patents. His work primarily focuses on fabrication methods that enhance the performance and efficiency of electronic devices.
Latest Patents
One of his latest patents is a fabrication method for vacuum microelectronic devices. This invention involves a process for creating a microstructure with a vacuum-sealed cavity. The method includes forming an aluminum-filled cavity in a silicon material and subsequently heating the structure to allow the aluminum to be absorbed into the silicon, resulting in a vacuum within the cavity. In another embodiment, a cavity is etched into a silicon wafer, filled with aluminum, and covered with a silicon dioxide layer before heating to produce the vacuum cavity.
Another significant patent is the method of forming planarized, reusable calibration grids. This invention improves the structure for electron beam lithography grids, allowing for grid lines that are coplanar with the grid body and supported by grooves. This design not only enhances the accuracy of the calibration grids but also allows for cleaning after contamination, thus improving the efficiency and cost-effectiveness of the electron beam lithography process.
Career Highlights
Robert R. Wilbarg is associated with International Business Machines Corporation (IBM), where he has contributed to various innovative projects. His work has been instrumental in advancing technologies that are crucial for modern electronics.
Collaborations
Throughout his career, Wilbarg has collaborated with notable colleagues, including Claude Johnson, Jr. and George J. Giuffre. These collaborations have further enriched his contributions to the field of microelectronics.
Conclusion
Robert R. Wilbarg's innovative patents and contributions to the field of microelectronics demonstrate his commitment to advancing technology. His work continues to influence the development of efficient electronic devices, showcasing the importance of innovation in this rapidly evolving industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.