This inventor holds 2 USPTO granted patents and 4 published patent applications and 2 EPO patents. Top assignee: Imec Vzw. Active years: 2018-2021.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2018-2021
Title: Innovations by Inventor Robert Miller
Introduction
Robert Miller is a notable inventor based in Lubbeek, Belgium. He has made significant contributions to the field of semiconductor technology, holding two patents that showcase his expertise and innovative spirit. His work primarily focuses on methods of bonding semiconductor substrates, which are crucial for the advancement of electronic devices.
Latest Patents
Miller's latest patents include a method of bonding semiconductor substrates that involves integrating semiconductor dies. This technology relates to bonding semiconductor substrates using a dielectric bonding layer made of silicon carbon oxide (SiCO), silicon carbon nitride (SiCN), or silicon carbide (SiC). The method includes pre-treating the dielectric bonding layers of both substrates through plasma activation and wet surface treatment before bonding them together. Additionally, he has developed a method for direct bonding of semiconductor substrates, which involves reducing the roughness of the dielectric layer and utilizing a pre-bond annealing step. This innovative approach has demonstrated excellent bond strength at lower temperatures than previously known methods.
Career Highlights
Robert Miller is currently employed at Imec Vzw, a leading research and innovation hub in nanoelectronics and digital technologies. His work at Imec has allowed him to push the boundaries of semiconductor technology and contribute to advancements in the field.
Collaborations
Miller has collaborated with esteemed colleagues such as Lan Peng and Soon-Wook Kim. These partnerships have fostered a collaborative environment that enhances the innovation process and leads to groundbreaking developments in semiconductor bonding techniques.
Conclusion
Robert Miller's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in electronic devices and semiconductor manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile