Company Filing History:
Years Active: 2002-2004
Title: Innovations of Robert Martinson
Introduction
Robert Martinson is a notable inventor based in San Mateo, California. He has made significant contributions to the field of semiconductor processing and magnetron sputtering technology. With a total of five patents to his name, Martinson's work has had a considerable impact on the industry.
Latest Patents
One of Martinson's latest patents is a method for active wafer centering using a single sensor. This innovative approach allows a robotic semiconductor wafer processing system to correct for wafers that have become offset during processing. By determining the amount of offset, the system can re-center the wafer during transport to the next process station using a single sensor to locate the wafer's center point. The method involves calculating directional coordinates for measured points on the wafer's edge and determining the intersection points of two circles derived from these measurements.
Another significant patent is focused on controlling the erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target. This apparatus and method optimize the non-planar target shape of a sputtering magnetron system to minimize the redeposition of sputtered material. The methodology integrates sputtered material from each point of the target based on its solid angle view of the rest of the target. Various target geometries, including trapezoidal, cylindrical, parabolic, and elliptical shapes, can be optimized for desired process parameters.
Career Highlights
Throughout his career, Martinson has worked with prominent companies such as Novellus Systems Incorporated and Steag Hamatech AG. His experience in these organizations has allowed him to develop and refine his innovative technologies in semiconductor processing.
Collaborations
Martinson has collaborated with notable individuals in the field, including Karl B. Levy and Dhairya Shrivastava. These collaborations have contributed to the advancement of technology in the semiconductor industry.
Conclusion
Robert Martinson's contributions to semiconductor processing and magnetron sputtering technology highlight his innovative spirit and dedication to advancing the field. His patents reflect a commitment to improving efficiency and effectiveness in these critical areas of technology.