Beaverton, OR, United States of America

Robert M Guptill


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 13(Granted Patents)


Company Filing History:


Years Active: 1993

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1 patent (USPTO):Explore Patents

Title: The Innovative Contributions of Robert M. Guptill

Introduction

Robert M. Guptill, based in Beaverton, Oregon, is an accomplished inventor known for his significant contributions in the field of materials and semiconductor processing. With a focus on improving manufacturing techniques, Guptill holds a patent that enhances the efficiency and effectiveness of photoresist stripping processes.

Latest Patents

Guptill's patent, titled "Dry Process for Stripping Photoresist from a Polyimide Surface," presents a novel method for removing photoresist from a substrate after the polyimide layer has been etched. This dry process introduces a plasma treatment using oxygen radicals, ideally suited for ensuring that the photoresist is stripped without significantly affecting the underlying polyimide. The technique innovatively employs a spectral emission detection method to identify the endpoint of the stripping process, ensuring complete removal while maintaining the integrity of the polyimide surface.

Career Highlights

Robert M. Guptill has made notable strides in the semiconductor industry while working at Intel Corporation. His expertise in photoresist processes and material science has positioned him as a valuable asset in advancing manufacturing technologies. His work has the potential to streamline fabrication processes, thereby enhancing production efficiency in the tech sector.

Collaborations

During his career, Guptill has collaborated with fellow innovators such as Chi-Hwa Tsang and Peter K. Charvat. These collaborations have bolstered the development of advanced methods in semiconductor processing, focusing on innovative solutions that address industry challenges.

Conclusion

Robert M. Guptill’s contributions to the field of semiconductor manufacturing through his patented innovations demonstrate his commitment to advancing technology. His work at Intel Corporation and collaborations with other experts highlight the significance of teamwork in fostering innovation. Guptill's patented process not only represents a technical achievement but also sets a foundation for future developments in the field.

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