Robert Lawrence Healton

Title: Innovations of Robert Lawrence Healton

Introduction

Robert Lawrence Healton is a notable inventor based in Kokomo, IN (US). He has made significant contributions to the field of micro-electro-mechanical systems (MEMS) with a total of 4 patents to his name. His work focuses on methods and apparatuses that enhance the testing and characterization of microelectric features.

Latest Patents

One of Healton's latest patents is titled "Method and apparatus for electrically testing and characterizing formation of microelectric features." This invention involves etching a semiconductor wafer to create an array of MEMS devices while simultaneously establishing test sites that represent critical geometries of these devices. The design includes probe contacts in the test sites to measure resistance and capacitance, which helps determine the effectiveness of the etching process. Another significant patent is "MEMS sensor structure and microfabrication process therefor." This patent describes a micro-electro-mechanical structure that includes a semiconductor layer mounted to an annular support structure. The structure is micromachined to form a suspended body with various projections, allowing for advanced functionalities in MEMS applications.

Career Highlights

Throughout his career, Healton has worked with prominent companies such as Delco Electronics Corporation and Delphi Technologies, Inc. His experience in these organizations has contributed to his expertise in the field of microelectronics and MEMS technology.

Collaborations

Healton has collaborated with notable individuals in his field, including John Carl Christenson and Douglas Ray Sparks. These partnerships have likely fostered innovation and advancements in their respective projects.

Conclusion

Robert Lawrence Healton's contributions to the field of micro-electro-mechanical systems are significant and impactful. His patents reflect a deep understanding of semiconductor technology and its applications in modern electronics.