Company Filing History:
Years Active: 1990-1992
Title: The Innovative Contributions of Robert L. Mozzi
Introduction
Robert L. Mozzi is a notable inventor based in Lincoln, MA (US), recognized for his significant contributions to semiconductor fabrication technology. With a total of 4 patents to his name, Mozzi has made strides in the field of illumination apparatus and manufacturing methods.
Latest Patents
One of his latest patents is an "Illumination apparatus for semiconductor fabrication including conical." This invention describes a method of patterning a photoresist layer to create an aperture with retrograde sidewalls. The illumination can be achieved through a conical prism arrangement or a conical reflecting mirror combined with a cylindrical mirror. The process involves directing energy towards a mask that selectively exposes parts of a photoresist layer on a substrate. The energy is directed at an oblique angle, sensitizing the underlying photoresist layer, which is then removed to leave an aperture with retrograde sidewalls. This profile is preferred for the reliable lift-off of deposited materials from the semiconductor substrate.
Another significant patent is the "Method of manufacture TiW alignment mark and implant mask." This method defines contact implants for source and drain regions while simultaneously creating alignment markers for a gate electrode on a channel region. It involves providing a titanium tungsten refractory metal layer over the substrate and patterning it to form both an alignment marker and an implant region mask. After the implant step, the refractory material is removed, leaving only the alignment markers, which are crucial for aligning a masking pattern to create component electrodes.
Career Highlights
Robert L. Mozzi has built a distinguished career at Raytheon Company, where he has applied his expertise in semiconductor technology. His innovative approaches have contributed to advancements in the field, enhancing the efficiency and effectiveness of semiconductor fabrication processes.
Collaborations
Throughout his career, Mozzi has collaborated with esteemed colleagues such as Ernst F. Schloemann and Philip A. Lamarre. These collaborations have fostered a productive environment for innovation and development in semiconductor technologies.
Conclusion
Robert L. Mozzi's contributions to semiconductor fabrication through his patents and work at Raytheon Company highlight his role as a key innovator in the field. His inventions continue to influence the industry, paving the way for future advancements in technology.