The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 1990
Filed:
May. 31, 1989
Applicant:
Inventors:
Robert L Mozzi, Lincoln, MA (US);
Thomas E Kazior, Sudbury, MA (US);
Assignee:
Raytheon Company, Lexington, MA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 40 ; 437 30 ; 437 39 ; 437245 ; 437912 ; 437924 ; 148D / ;
Abstract
A method for defining simultaneously contact implants for source and drain regions and alignment markers for a gate electrode on a channel region includes the steps of providing a refractory metal layer of titanium tungsten over the substrate and patterning the refractory layer to form simultaneously an alignment marker and implant region mask over said substrate. Subsequent to an implant step, the refractory material in all regions of the substrate is removed, except for the portions defining the alignment markers, which are then used to align a masking pattern to provide component electrodes.