Robert L Belli

Title: Innovations of Robert L. Belli

Introduction

Robert L. Belli is an accomplished inventor based in Columbus, OH (US). He has made significant contributions to the field of sputtering technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and functionality of sputter target assemblies.

Latest Patents

One of Robert L. Belli's latest patents is the "Quick Change Sputter Target Assembly." This invention features a sputtering target assembly that includes a sputtering gun with an inner and outer annular wall. The inner annular wall is equipped with a plurality of radially projecting set screws, which are threadably movable within threaded apertures. A mounting ring is designed to fit over the inner annular wall, incorporating a recessed groove for securing the mounting ring with the set screws. Additionally, the mounting ring contains radially disposed spring plungers that are threadably installed in threaded apertures. The target itself has a grooved inner annular surface to accommodate the spring ball plungers, ensuring that the target is securely retained to the sputtering gun.

Another notable patent by Belli is also titled "Quick Change Sputter Target Assembly." This invention pertains to a sputter source that utilizes thermal expansion of an annular sputter target to maintain good physical contact with a peripheral cooling wall. The patent introduces novel means for holding the sputter target in place when both the source and target are at ambient temperature. In a preferred embodiment, the holding means consists of spring mechanisms that interact with a groove in the sputter target's rim. By applying sufficient axial force, the gripping force of the spring means can be overcome, allowing for easy removal or insertion of the target. This invention also includes a structure that can retrofit the quick change target into existing sputter sources.

Career Highlights

Robert L. Belli is currently employed at Tosoh SMD, Inc., where he continues to innovate in the field of sputtering technology. His work has significantly impacted the efficiency of sputtering processes, making them more user-friendly and effective.

Collaborations

Throughout his career, Belli has collaborated with notable colleagues, including Kenneth B. Fielder and Conrad E. Fuchs. These collaborations have contributed to the advancement of technology in their respective fields.

Conclusion

Robert L. Belli is a prominent inventor whose