This inventor holds 1 USPTO granted patent. Top assignee: Speedfam-Ipec Corporation. Active years: 2004.
Company Filing History:
Years Active: 2004
Title: The Innovations of Robert Key
Introduction
Robert Key is an accomplished inventor based in Phoenix, AZ. He has made significant contributions to the field of wafer processing technology. His innovative designs have led to the development of a unique workpiece carrier retaining element.
Latest Patents
Robert Key holds a patent for a workpiece carrier retaining element. This invention features a wafer carrier retaining ring that includes a first annular surface designed to contact a polishing surface during the polishing process. The inner diameter surface adjoins the first annular surface, forming a first annular corner with a radius ranging from no less than about 0.010 inches to less than a radius that would damage a wafer being polished. Additionally, the invention includes embodiments with a second annular corner having a radius of no less than 0.030 inches and options for a ceramic material construction with a surface finish of no greater than 2 microinches rms.
Career Highlights
Robert Key is currently employed at Speedfam-Ipec Corporation, where he continues to innovate in the field of semiconductor manufacturing. His work has been instrumental in enhancing the efficiency and effectiveness of wafer polishing processes.
Collaborations
Throughout his career, Robert has collaborated with notable colleagues such as Frank McPeek and Wayne Lougher. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Robert Key's contributions to the field of wafer processing technology exemplify the spirit of innovation. His patent for the workpiece carrier retaining element showcases his commitment to improving manufacturing processes. His work at Speedfam-Ipec Corporation and collaborations with esteemed colleagues further highlight his impact in the industry.