Robert Gordon Poulsen

Title: The Innovations of Robert Gordon Poulsen: Advancements in Plasma Etching

Introduction

Robert Gordon Poulsen, a notable inventor from Ottawa, Canada, has made significant contributions to the field of plasma etching with three patents to his name. His innovative methods have paved the way for advancements in various applications, greatly improving the precision and efficiency of etching processes.

Latest Patents

Poulsen's latest patents focus on enhancing the techniques involved in plasma etching. One of his patents, titled "End Point Control in Plasma Etching," details a method for detecting the completion of etching by monitoring the optical emissions from the plasma. By selecting a particular optical emission line and identifying substantial variations in intensity, this innovation allows for real-time detection of material changes during the etching process, as well as the removal of photoresist material.

Another remarkable achievement is described in his patent for the "Method of Plasma Etching." This technique emphasizes the importance of temperature control within the plasma gas to ensure high-quality and reproducible results. It enables precise adjustments to the RF power supply based on temperature variations, leading to enhanced control over the etching rate and a swift preheat cycle prior to etching operations. Poulsen's use of gas thermometers with quartz capillaries exemplifies his commitment to accuracy and efficiency.

Career Highlights

Robert Gordon Poulsen has been instrumental in advancing etching technologies while working at Northern Telecom Limited. His expertise in plasma etching has contributed to significant developments within the company, aligning with the broader aims of enhancing telecommunications equipment through innovative engineering solutions.

Collaborations

Throughout his career, Poulsen has worked alongside talented individuals such as Sidney Ivor Ingrey and Heinz Josef Nentwich. These collaborations have enriched his work, fostering an environment of creativity and technical excellence, which continues to influence the development of etching technologies today.

Conclusion

Robert Gordon Poulsen’s contributions to plasma etching methods demonstrate his profound impact on the field of invention. His patents embody the spirit of innovation, showcasing a dedication to improving the efficiency and effectiveness of etching processes. As he continues to work in this vital area, Poulsen remains a key figure in advancing the technological landscape of telecommunications and beyond.