Robert G Massey

Title: The Innovations of Robert G. Massey

Introduction

Robert G. Massey is an accomplished inventor based in Whiteright, Texas. He is known for his significant contributions to the field of thermal processing technology. With a focus on enhancing the efficiency and effectiveness of silicon and gallium arsenide wafer processing, Massey has made a notable impact in the industry.

Latest Patents

Massey holds a patent for a Vertical Thermal Processor. This innovative device is designed as a vertically oriented thermal processor, also referred to as a vertical diffusion furnace. It is specifically engineered for the processing of silicon or gallium arsenide wafers or substrates. The processor features a vertically positionable furnace assembly and a quartz bell-jar shaped element that positions coaxially over another quartz bell jar-like vertically positionable process tube, creating a dual wall contamination barrier. The furnace and process tube can be moved pneumatically, either as a unit or independently, during various processing modes. Pneumatic cylinders facilitate the lifting of the furnace element away from the wafers, allowing for an accelerated ramp-down of temperatures. Additionally, an overhead track enables the rapid removal of the furnace and process tube to the exterior of the cabinet without disconnecting electrical, pneumatic, or gas connections for maintenance or component changeout. A microprocessor controls and monitors all functions of the vertical thermal processor, featuring both rear microprocessor control and front panel control. Silicon wafer loads can be loaded from the front, side, or back using manual, softlander, or robotic means.

Career Highlights

Massey has dedicated his career to advancing thermal processing technologies. His work at Semitherm has positioned him as a key player in the development of innovative solutions for the semiconductor industry. His patent reflects his commitment to improving processing techniques and enhancing the quality of semiconductor materials.

Collaborations

Massey has collaborated with notable colleagues, including Donald W. Heidt and Billy B. Williams. These partnerships have contributed to the successful development and implementation of advanced thermal processing technologies.

Conclusion

Robert G. Massey is a pioneering inventor whose work in thermal processing technology has significantly influenced the semiconductor industry. His innovative vertical thermal processor exemplifies his dedication to enhancing processing efficiency and quality.