Sloatsburg, NY, United States of America

Robert G Hieronymi

USPTO Granted Patents = 7 


Average Co-Inventor Count = 3.1

ph-index = 6

Forward Citations = 283(Granted Patents)


Location History:

  • Sloatsburg, NY (US) (1984)
  • Rock Cavern, NY (US) (1990 - 1995)
  • Rock Tavern, NY (US) (1995)

Company Filing History:


Years Active: 1984-1995

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7 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Robert G. Hieronymi

Introduction

Robert G. Hieronymi, an influential inventor based in Sloatsburg, NY, has made significant strides in the field of sputter coating apparatus technology. With a remarkable portfolio that includes seven patents, his innovations are instrumental in advancing the capabilities and efficiency of coating processes.

Latest Patents

Among Hieronymi's latest patents are groundbreaking inventions focused on enhancing sputter coating techniques. One notable patent is titled "Target cooling and support for magnetron sputter coating apparatus." This invention features a uniquely designed target that varies in thickness across its radius to optimize the sputtering of materials. A rotating magnet carrier, equipped with either permanent or electromagnetic strips, creates a magnetic tunnel that effectively traps plasma over the target. By implementing a comprehensive cooling system, this invention maintains the target's performance while improving sputter distribution.

Another significant patent from Hieronymi is the "Plasma shaping plug for control of sputter etching." This invention introduces a re-entrant plug structure that helps manipulate ionized plasma within a processing chamber. By varying the concentration of ionic gas particles over a wafer's surface, it ensures controlled and selective sputter etching rates. The plug can be tailored in size and shape, and the integration of a magnet can further enhance plasma manipulation.

Career Highlights

Hieronymi's career is marked by his dedication to research and development in sputter coating technologies. He is a key inventor affiliated with Materials Research Corporation, where his work has been fundamental in evolving the industry standards for plasma processing.

Collaborations

Throughout his career, Hieronymi has collaborated with esteemed professionals, including Steven D. Hurwitt and Israel Wagner. This collaboration has fostered innovative developments and advanced the field of materials research.

Conclusion

Robert G. Hieronymi's innovative contributions and patent portfolio are a testament to his expertise as an inventor. His advancements in sputter coating technology not only enhance manufacturing processes but also pave the way for future innovations in material processing industries. His ongoing work continues to inspire and influence the evolution of technology in this critical sector.

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