This inventor holds 3 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2002-2005.
Location History:
- Dresden, DE (2002 - 2003)
- Alameda, CA (US) (2005)
Company Filing History:
Years Active: 2002-2005
Title: **The Innovative Mind of Robert G. Boehm**
Introduction
Robert G. Boehm is an accomplished inventor based in Dresden, Germany. With a total of three patents to his name, he has made significant contributions to the field of semiconductor polishing technologies. His innovative methods and apparatuses have enhanced the efficiency and effectiveness of polishing processes, making a noticeable impact in the industry.
Latest Patents
One of Robert's latest patents is focused on a **Method and apparatus for conditioning a polishing pad with sonic energy**. This invention describes a method wherein a sonic energy generator is positioned above the polishing surface of a pad, which is used for polishing semiconductor wafers. By applying sonic energy to the polishing surface, the efficiency of the polishing process can be improved.
Another notable patent is the **Field controlled polishing apparatus**. This polishing tool comprises a polishing pad supported by a bladder filled with fluid, alongside flux guides that direct magnetic flux to specific locations on the bladder. The method allows for adjustments in pressure based on the magnetic flux, thereby controlling the polishing profile of the surface being treated. These innovative designs showcase Robert's expertise in overcoming challenges in semiconductor manufacturing.
Career Highlights
Robert G. Boehm is currently associated with Lam Research Corporation, a leading company in the semiconductor equipment industry. His role encompasses groundbreaking research and development in polishing technologies, where he applies his inventive spirit to advance the company's capabilities.
Collaborations
Throughout his career, Robert has collaborated with several notable figures, including coworkers John Boyd and Allan M. Radman. These collaborations have fostered an environment of innovation and efficiency, allowing for the sharing of ideas and expertise that enhance the development of new technologies.
Conclusion
Robert G. Boehm stands as a prominent figure in the realm of semiconductor innovations. His patents not only represent his inventive capabilities but also reflect the continuous advancement of polishing technologies. As the semiconductor industry evolves, the contributions of inventors like Robert are vital for driving future innovations and improving manufacturing processes.