Company Filing History:
Years Active: 1987-1988
Title: The Innovations of Robert G. Behrens
Introduction
Robert G. Behrens, an accomplished inventor based in Los Alamos, New Mexico, has made significant contributions to the field of ion sources and alloys. With a total of two patents to his name, he has focused on developing advanced technologies that have applications in the semiconductor industry.
Latest Patents
Robert G. Behrens holds two notable patents. The first is for a "Liquid metal ion source and alloy," which details a system where the emitted species from the ion source is contained within a congruently vaporizing alloy. This invention includes an embodiment where the liquid metal ion source serves as a source of arsenic, combining it with palladium in a liquid alloy that holds between 24 to 33 atomic percent arsenic. Prepared using a combustion synthesis technique, these liquid metal ion sources efficiently produce arsenic ions for implantation and maintain long operational lifetimes, demonstrating remarkable stability.
His second patent, "Liquid metal ion source and alloy for ion emission of multiple ionic species," expands on his innovative work by allowing for the simultaneous ion evaporation of arsenic, boron, and phosphorus. The ionic species involved are contained in palladium-arsenic-boron and palladium-arsenic-boron-phosphorus alloys. The construction of the ion source incorporates materials like rhenium and tungsten to create an efficient system that emits continuous ion beams with high currents, making it extremely useful in ion implantation for semiconductor wafers in integrated circuit device production.
Career Highlights
Throughout his career, Robert G. Behrens has worked with renowned organizations such as Hughes Aircraft Company and the Oregon Graduate Center. His extensive experience in these settings provided him with the platform to explore and innovate in the field of ion sources and alloys, contributing to his patents.
Collaborations
Behrens collaborated with notable individuals in his field, including William M. Clark, Jr. and Mark W. Utlaut. These partnerships have undoubtedly enriched his work and facilitated further advancements in technology related to ion sources.
Conclusion
In conclusion, Robert G. Behrens stands out as a pivotal figure in the development of liquid metal ion sources and alloys. His innovative patents not only showcase his expertise but also highlight his significant contributions to the semiconductor industry. As technology continues to evolve, Behrens' work will likely remain influential in future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.