Company Filing History:
Years Active: 2003-2005
Title: Innovations by Robert E Weeks in Laser Technology
Introduction
Robert E Weeks is a notable inventor based in San Diego, California. He has made significant contributions to the field of laser technology, particularly in the cleaning and passivation of laser discharge chambers. With a total of two patents to his name, Weeks has demonstrated his expertise and innovative thinking in this specialized area.
Latest Patents
Weeks' latest patents focus on methods and apparatus for cleaning and passivating laser discharge chambers using plasmas. In one embodiment, an oxygen-based plasma is created in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen-containing gases. This oxygen-based plasma is then drawn into the laser discharge chamber, where it reacts with contaminants to clean the internal surfaces. Following this cleaning process, a fluorine-based plasma is formed in the plasma source and introduced into the chamber to passivate the internal surfaces. In another embodiment, the cleaning step with the oxygen-based plasma may be omitted, as some level of cleaning is achieved with the fluorine-based plasma alone. Additionally, oxygen-based and fluorine-based plasmas can be generated directly within the laser discharge chamber by applying a radiofrequency signal to the chamber's electrode. This plasma cleaning and passivation method is considered safer, more efficient, and more effective than traditional thermal cleaning and passivation processes.
Career Highlights
Robert E Weeks is currently employed at Cymer, Inc., where he continues to innovate in the field of laser technology. His work has contributed to advancements that enhance the performance and reliability of laser systems.
Collaborations
Weeks has collaborated with notable colleagues, including Tom A Watson and Richard L Sandstrom, who have also contributed to the field of laser technology.
Conclusion
Robert E Weeks is a distinguished inventor whose work in laser discharge chamber passivation has paved the way for safer and more efficient cleaning methods. His contributions to the field are invaluable and continue to influence advancements in laser technology.