This inventor holds 2 USPTO granted patents. Top assignee: Rodel Holdings, Inc.. Active years: 2000-2002.
Company Filing History:
Years Active: 2000-2002
Title: Innovations of Robert C. Roberts
Introduction
Robert C. Roberts is an accomplished inventor based in Mint Hill, NC (US). He has made significant contributions to the field of chemical mechanical polishing, with a focus on enhancing the performance of integrated circuit structures. His innovative work has led to the development of two notable patents.
Latest Patents
Robert C. Roberts holds two patents that showcase his expertise in chemical mechanical polishing compositions. The first patent, titled "Small particle size chemical mechanical polishing composition," presents a slurry designed for the planarization of shallow trench isolation structures and other integrated circuit structures. This invention features small abrasive particles with a mean diameter ranging from about 2 to 30 nm, alongside larger abrasive particles that are 2 to 10 times larger than the smaller ones. The slurry can also incorporate viscosity additives and etchants to enhance its effectiveness.
The second patent, "Chemical mechanical polishing composition and method of polishing," outlines a method for polishing substrates with patterned regions. This method utilizes a similar chemical mechanical polishing slurry, ensuring optimal planarization of shallow trench isolation structures and integrated circuit components. The inclusion of viscosity additives and etchants further improves the polishing process.
Career Highlights
Robert C. Roberts is currently associated with Rodel Holdings, Inc., where he continues to innovate in the field of chemical mechanical polishing. His work has been instrumental in advancing the technology used in semiconductor manufacturing.
Collaborations
Throughout his career, Robert has collaborated with notable colleagues, including Robert L. Rhoades and Paul J. Yancey. These partnerships have contributed to the development of cutting-edge solutions in the industry.
Conclusion
Robert C. Roberts is a prominent inventor whose contributions to chemical mechanical polishing have significantly impacted the semiconductor industry. His patents reflect a commitment to innovation and excellence in technology.