Robert A Poitras

Title: Innovations by Robert A. Poitras: Pioneering Technologies in Semiconductor Equipment

Introduction

Robert A. Poitras, an inventive mind based in Beverly, MA, has made significant contributions to the field of semiconductor equipment through his innovative designs and patented technologies. With a total of two patents to his name, Poitras's work reflects a deep understanding of the intricacies involved in semiconductor processing and the importance of precise control in manufacturing.

Latest Patents

Among his latest inventions is the "Force Sensing System for Substrate Lifting Apparatus." This system and method efficiently monitor forces on a substrate lifting apparatus. It comprises a platen cartridge with a platen and a movable lifting portion that features multiple lifting arms connected to various lift pins. Each lifting arm has associated force sensing elements that relay signals to a controller. This controller analyzes the signals to detect potential error conditions, such as a stuck, broken, or mis-positioned wafer, as well as mechanical malfunctions.

Another notable patent by Poitras is the "Ion Beam Incidence Angle and Beam Divergence Monitor." This sophisticated device measures the incidence angle of an ion beam impacting a planar substrate. It includes an aperture plate designed to intercept the ion beam and a sensor that produces signals based on where the ion beam strikes the sensor. These sensors are invaluable in determining the incidence angle and beam divergence, thus enhancing the precision of ion beam applications in semiconductor manufacturing.

Career Highlights

Poitras currently works at Varian Semiconductor Equipment Associates, Inc., where he continues to develop technologies that advance the semiconductor industry. His expertise has been pivotal in improving manufacturing processes that require high precision and reliability.

Collaborations

Throughout his career, Poitras has collaborated with notable colleagues like Grant Kenji Larsen and Ashwin Madhukar Purohit. These collaborations have enriched his work experience, allowing for the sharing of ideas and fostering innovation in the equipment used for semiconductor manufacturing.

Conclusion

Robert A. Poitras is a recognized inventor whose contributions to semiconductor technology have had a profound impact on the industry. His patents showcase his innovative approach to problem-solving and highlight the significant role that precise force monitoring and ion beam measurement play in modern semiconductor processes. As technology continues to evolve, the advancements introduced by Poitras will remain vital to the efficiency and effectiveness of semiconductor manufacturing.