Company Filing History:
Years Active: 1988-1991
Title: The Innovations of Robert A Bowling
Introduction
Robert A Bowling is a notable inventor based in Garland, TX (US). He has made significant contributions to the field of integrated circuit processing, holding a total of 4 patents. His work focuses on improving the efficiency and cleanliness of wafer handling in semiconductor manufacturing.
Latest Patents
One of his latest patents is an integrated circuit processing system that features a vacuum-tight wafer carrier. This innovative carrier is designed with a load lock suitable for use with the wafer carrier. The wafers are supported on each side by a slightly sloping shelf, which minimizes contact between the wafer surface and the shelf. This design reduces the generation of particulates caused by abrasion. Additionally, the carrier includes elastic elements that prevent the wafers from rattling, further minimizing particulate generation. When the wafer carrier is placed into the load lock, its body is lowered through an aperture into a lower chamber, allowing for wafer loading and unloading under vacuum conditions. The carrier cover remains in place, ensuring that the wafers are never exposed to the atmosphere. A wafer transport arm mechanism facilitates the interchange of wafers among various processing stations and load locks.
Career Highlights
Robert A Bowling is currently employed at Texas Instruments Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the efficiency of integrated circuit processing systems.
Collaborations
Throughout his career, Robert has collaborated with several talented individuals, including Cecil J Davis and Robert T Matthews. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Robert A Bowling's contributions to integrated circuit processing have made a significant impact on the semiconductor industry. His innovative designs and patents continue to enhance the efficiency and cleanliness of wafer handling processes.