Company Filing History:
Years Active: 2008-2011
Title: Innovations of Riyuusuke Kasamatsu
Introduction
Riyuusuke Kasamatsu is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the manufacturing of SIMOX wafers. With a total of four patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of his latest patents is a method for manufacturing SIMOX wafers. This innovative method focuses on reducing the roughness of an SOI layer and the interface between the SOI layer and a BOX layer. The process involves forming a first ion-implanted layer containing highly concentrated oxygen within a wafer, followed by the formation of a second ion-implanted amorphous layer. A high-temperature heat treatment is then conducted, transforming the first and second ion-implanted layers into a BOX layer. This is achieved by holding the wafer at a temperature between 1300°C or more and less than the silicon melting point in an atmosphere containing oxygen. The specific parameters for the first and second ion-implanted layers are also defined in the patent.
Another notable patent by Kasamatsu is related to the production of SIMOX wafers. This method involves implanting oxygen ions into the surface of a silicon substrate and conducting high-temperature annealing. The atmosphere during the end stage of the high-temperature annealing treatment is specified to be an argon or nitrogen atmosphere containing oxygen in a volume percentage of more than 3% but not exceeding 10%.
Career Highlights
Riyuusuke Kasamatsu is currently associated with Sumco Corporation, a leading company in the semiconductor industry. His work at Sumco has allowed him to further develop his innovative ideas and contribute to advancements in wafer technology.
Collaborations
Throughout his career, Kasamatsu has collaborated with notable colleagues, including Yoshiro Aoki and Hideki Nishihata. These collaborations have fostered a productive environment for innovation and have led to the successful development of new technologies.
Conclusion
Riyuusuke Kasamatsu is a distinguished inventor whose work in the field of semiconductor technology has led to significant advancements in the manufacturing of SIMOX wafers. His innovative methods and collaborations with industry professionals continue to shape the future of this technology.