Rikiya Nakamura

Title: Rikiya Nakamura: Innovator in Waste Gas Treatment Technology

In the realm of environmental technology, Rikiya Nakamura emerges as a significant figure hailing from Kanagawa, Japan. With a total of nine patents to his name, Nakamura has contributed immensely to the field of waste gas treatment, focusing on efficient and safe methods of managing hazardous emissions.

Latest Patents

Rikiya Nakamura's latest innovations include a cutting-edge combustion type waste gas treatment system. This system is designed to oxidatively decompose hazardous combustible waste gases while efficiently utilizing heat. Its advanced structure allows for an effective mixing of waste gases with auxiliary burning gases, thereby preventing backfire in the waste gas inlet pipe. The design features a burner part and a combustion chamber, where combustion flames extend from the burner into the combustion chamber, facilitating the oxidation of the introduced waste gases.

Another noteworthy patent he secured is for a burner specifically used in a combustion-type waste gas treatment system aimed at combusting waste gases emitted from semiconductor manufacturing processes. This includes gases such as silicon hexafluoride (SiHF) combined with halogen-based gases. The burner operates with high efficiency, minimizing the deposition of silicon dioxide powder while ensuring low nitrogen oxides (NOx) emissions and maintaining robust safety standards. The design incorporates a flame stabilizing zone, where the waste gas, auxiliary combustible agent, and air are thoroughly mixed before being directed into the combustion chamber.

Career Highlights

Rikiya Nakamura is a dedicated inventor at Ebara Corporation, a well-known company in the environmental technology sector. His innovative approaches to waste gas treatment have positioned him at the forefront of the industry. With nine patents registered, Nakamura's work showcases a commitment to creating effective and environmentally friendly solutions.

Collaborations

Throughout his career, Rikiya Nakamura has collaborated with esteemed colleagues, including Yuji Shirao and Yoshiro Takemura. Together, they have pushed the boundaries of waste gas treatment technology, contributing to the development of the advanced systems that continue to improve emissions management.

Conclusion

Rikiya Nakamura's inventive spirit and technological advancements in the field of waste gas treatment underscore his vital role as an innovator. His work not only enhances the efficiency of waste management processes in semiconductor manufacturing but also contributes to greater environmental safety. As industry challenges evolve, Nakamura's contributions will likely continue to be pivotal in addressing modern environmental concerns.